Research Facilities - Photonic Integration System Research Center

Research Facilities

	PL Photoluminescence mapping system
	C-V Carrier density profiling system
	Sputter Full-automatic sputtering system for the formation of electrical insulator material, such as SiO₂, for optoelectric devices.
	ICP Dry etching system based on inductively coupled plasma for micro-fine patterns and smooth vertical walls of lightwave integrated circuits and optical devices.
	EB Evaporation
	Oxidation Self-designed AlAs selective oxidation system for fabricating current confinement in VCSELs.
	Photo-lithography
	Robonano NC machine for nano-scale structure fabrication using lathe with five super precision axes.
	FIB
	Ellipsometer
	AFM Atomic force scanning microscope (AFM) for observing quantum dots, epitaxial surface and micro-apertures.
	SEM
	VCSEL measurement Laser characterization system for 2-dimensional VCSEL array.
	BER High speed (up to 40Gb/sec) bit error rate measuring system for lightwave communication.
	Optical network analyzer The optical network analyzer is used for measuring chromatic dispersion of an optical filter and a dispersion compensator consisting of a waveguide, dielectric multilayer, and so on.